1700°C CVD Tube Furnace(STGC-60-17)

  • Model No. :STGC-60-17
  • Quartz Tube(OD):Φ60mm
  • Heating Zone Length : 300MM
  • Continuous Temp. :1600℃
  • Max Temp.:1700°C
  • Heating Element:Molybdenum Disilicide( MoSi2)Heater
  • Power Supply:220V/5kw
  • Temperature Precision: ±1℃
  • Thermocouple: B type
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1700°C Tube Furnace Chemical Vapor Deposition (CVD) refers to the method of chemical gas or steam reacting on the surface of the substrate to synthesize coatings or
nanomaterials. It is the most widely used technology in the semiconductor industry to deposit a variety of materials, including a wide range of insulating materials,
most metallic materials and metal alloy materials.


Furnace shell

  1. The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion.
  2. The solid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low
  3. Horizontal use mode, upper opening structure, easy to operate

Refractory material

Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption

Heating system

  1. High-quality MoSi2 spiral resistance wire heating element is safely and firmly embedded on the surface of the furnace, and is heated by free heat radiation in the furnace cavity, which is energy-saving and efficient, and has a long service life
  2. Ring heating by resistance wire to achieve good uniformity in the furnace

Temperature Control Panel

  1. PID and SSR control mode, precise temperature control
  2. Internationally standardized B-type nickel-chromium-silicon thermocouple with a temperature measurement range of 0-1600℃ and a long service life
  3. The furnace door is equipped with a door-opening power-off safety protection switch

Program Controller

  1. Advanced controllers that meet complex process requirements
  2. Simple and direct operation, flexible programming
  3. Programmable 30 program segments for a single curve
  4. Over temperature and fault alarm, automatic safety protection

Vacuum Atmosphere Function

  1. With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube
  2. High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions
  3. The high-performance bipolar rotary vane vacuum pump can obtain a vacuum degree of 5pa, and the digital vacuum gauge can display the vacuum degree
  4. With air circuit control unit, the control unit can choose 1-3 way MFC automatic control system

Technical Parameter








Tube Size

Φ25 x 800mm

Φ40 x 1000mm

Φ60 x 1000mm

Φ80 x 1000mm

Φ100 x 1000mm

Φ120 x 1000mm

Max Temperature


Work Temperature


Heating Zone









Heating Element

Molybdenum Disilicide( MoSi2)Heater

Chamber Material

Polycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration

Tube Material

Alumina Tube

Temperature Accuracy



B type thermocuple

Temperature Controller

Intelligent microcomputer PID temperature control instrument, SCR/SSR control, PID parameter self-tuning function; programmable 30 program segments, program heating, program heat preservation, program cooling

Heating Rate

1-25℃/min freely set

Furnace Structure

Furnace temperature control integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation

Sealing Function

Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤5pa (rotary vane vacuum pump)

Atmosphere Performance

There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen.

Equipment Safety

Modular control, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically

Safety Protection

The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators

Furnace Shell

High-quality cold-rolled steel plate CNC machine tool blanking processing, after welding, grinding, polishing, phosphating, pickling, surface electrostatic spraying plastic powder

Quality Certificate

ISO9001   CE    SGS   TUV

Standard Accessroies

1. Furnace Body  2. Temperature Controller 3. Power Cable 3 meters  4.Thermocouple  5.Manual

6. Furnace Hook 7. One pair of high temperature gloves 8. Two pipe plugs  9. One set of sealing flange

Optional Accessories

 1. Optional rotary vane vacuum pump (vacuum degree ≤ 5pa  2. Optional digital vacuum gauge (1.0×105-1.0×10-1pa)  3. Optional float flowmeter (range 60-600ml/min)  4. Optional with quartz boat


1. Furnace body 1 set
2. Temperature controller 1
3. Power cord 3 meters 1
4. Thermocouple 1
5. Instruction manual 1
6. Crucible pliers 1
7. High temperature gloves  1 pair


  • 1 Year Warranty We can provide very professional commercial support, technical support and document support
  • 22 Years Experience We have more than 22 years of experience in Electirc Heating Equipment,Excellent temperature field uniformity is our strength
  • R&D Design Team Professional design and development team, to provide you with professional and reasonable heat treatment solutions
  • Quality Control Rigorous quality control process, each process process traceable, to provide customers with high quality products

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